"Illegal instruction" error when I use the latest STARsolo to analysis 10X genomics data

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I'm writing to ask for your help. I use the latest STARsolo to analysis the 10x genomics data(Single Cell 3' v3), and exit with the "Illegal instruction" error .But I can't pick out which parameter(s) is inappropriate. The command I used as follows:

STAR --runMode alignReads 
--runThreadN 16 --genomeDir $refgenome  
--readFilesIn B10X-5_S25_L004_R2_001.fastq B10X-5_S25_L004_R1_001.fastq 
--soloType CB_UMI_Simple 
--soloFeatures GeneFull 
--soloUMIlen 12 
--soloCBwhitelist $whitelist 
--clipAdapterType CellRanger4 
--outFilterScoreMin 30 
--soloCBmatchWLtype 1MM_multi_Nbase_pseudocounts 
--soloUMIfiltering MultiGeneUMI_CR 
--soloUMIdedup 1MM_CR 
--soloCellFilter EmptyDrops_CR 
--outFileNamePrefix ./B10X-5

Thanks for your suggestions.


statsolo


10x

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